Semiconductor industry EtherCAT bus drive control integrated turntable application

As an important part of semiconductor manufacturing process, monocrystalline silicon wafer manufacturing process is particularly important. After slicing, chamfering, grinding, surface treatment, polishing, epitaxy and other different processes, the surface has been seriously polluted, so there is a very important process segment is cleaning, its purpose is to remove the surface particles, metal ions and organic matter pollution.

For the manufacturing and cleaning process of monocrystalline silicon wafers, Kaifu Technology proposed the SSDC integrated EtherCAT bus driver +YKW series integrated turntable. It has the characteristics of smaller size, stable speed fluctuation and so on.

Process flow chart

Case presentation

Program advantage

The drive control unit is smaller

More stable speed